Measurement of wavefront curvature using computer-generated Fourier holograms

George Krasin; Michael Kovalev; Sergey Odinokov; Nikita Stsepuro; Yuriy Glukhov

doi:10.1117/12.2525719

21 June 2019 Measurement of wavefront curvature using computer-generated Fourier holograms

George Krasin, Michael Kovalev, Sergey Odinokov, Nikita Stsepuro, Yuriy Glukhov

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 1105629 (2019) https://doi.org/10.1117/12.2525719
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Laser radiation for a high precision measurement such as nanostructure measurement needed to be clean of wavefront aberrations. However, only expensive lasers with stabilization can achieve such robust parameters. The emission is needed to be corrected via adaptive optics. Nevertheless, high precision measurement of wavefront aberrations is necessary to high precision correction. The present work is dedicated to the problem of computer-generated Fourier holograms application for measurement of optical wavefront curvature with high precision. Mathematical modeling and experimental results of the method with the comparison of different approaches are presented.

Citation Download Citation

George Krasin, Michael Kovalev, Sergey Odinokov, Nikita Stsepuro, and Yuriy Glukhov "Measurement of wavefront curvature using computer-generated Fourier holograms", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105629 (21 June 2019); https://doi.org/10.1117/12.2525719

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available