Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry

Marc Wendel

doi:10.1117/12.2526734

28 June 2019 Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry

Marc Wendel

Author Affiliations +

Proceedings Volume 11171, Sixth European Seminar on Precision Optics Manufacturing; 1117109 (2019) https://doi.org/10.1117/12.2526734
Event: Sixth European Seminar on Precision Optics Manufacturing, 2019, Teisnach, Germany

Abstract

A comparison of two different measurement approaches, a tactile profilometer as well as a non-contact point-probe based metrology system, is conducted. The properties of each approach are highlighted, and measurement results examined.

Citation Download Citation

Marc Wendel "Measurement of freeforms and complex geometries by use of tactile profilometry and multi-wavelength interferometry", Proc. SPIE 11171, Sixth European Seminar on Precision Optics Manufacturing, 1117109 (28 June 2019); https://doi.org/10.1117/12.2526734

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