Paper
15 November 2019 Development of a reflective spiral phase plate based on MRF polishing
Author Affiliations +
Proceedings Volume 11175, Optifab 2019; 1117526 (2019) https://doi.org/10.1117/12.2536573
Event: SPIE Optifab, 2019, Rochester, New York, United States
Abstract
In this paper, we propose a fabrication process based on Magneto-Rheological Finishing (MRF) for a reflective Spiral Phase Plate (SPP) with a continuous surface. The front surface of a nickel-plated aluminum disk is machined by diamond turning as a plane mirror, and spiral structure with low topological charge is generated by sub-aperture polishing tools, i.e., MRF. Interferometers are used to analyze the smoothness of the spiral structure, steepness of the center step and surface roughness of the random areas for the fabricated SPP. The results indicate that the direct-polishing approach can be a promising technique to fabricate high-precision SPPs.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min-Woo Jeon, Sang-Won Hyun, Seok-Kyeong Jeong, Jong-Gyun Kang, Woo-Jong Yeo, and Geon-Hee Kim "Development of a reflective spiral phase plate based on MRF polishing", Proc. SPIE 11175, Optifab 2019, 1117526 (15 November 2019); https://doi.org/10.1117/12.2536573
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KEYWORDS
Spiral phase plates

Magnetorheological finishing

Polishing

Reflectivity

Surface finishing

Aluminum

Diamond turning

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