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31 December 2019 Evolution of femtosecond laser-induced periodic structures: from nanoholes to regular structures
Zhen-Ze Li, Lei Wang, Hua Fan, Yan-Hao Yu, Qi-Dai Chen, Saulius Juodkazis, Hong-Bo Sun
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Proceedings Volume 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019; 1120115 (2019) https://doi.org/10.1117/12.2541301
Event: ANZCOP, 2019, Melbourne, Australia
Abstract
Femtosecond laser-induced periodic surface structures have opened broad prospects in the aspect of high-efficient and low-cost nanotextured patterning, yet defined great challenges on how to keep the periodicity in a macro area. Herein, we report a transition from non-periodicity to periodicity as the scan strategies changing. By suppressing the transition from the initial structures to the nanogratings with long-range order, arbitrary high-resolution direct writing patterns have been obtained in a large area. We attribute this phenomenon to the dynamic evolution of the near-field energy deposition around the pre-existing structures. This approach paves another way to high-precision laser processing.
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Zhen-Ze Li, Lei Wang, Hua Fan, Yan-Hao Yu, Qi-Dai Chen, Saulius Juodkazis, and Hong-Bo Sun "Evolution of femtosecond laser-induced periodic structures: from nanoholes to regular structures", Proc. SPIE 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019, 1120115 (31 December 2019); https://doi.org/10.1117/12.2541301
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KEYWORDS
Femtosecond phenomena
Laser applications
Polarization
Near field
Optical lithography
Nanotechnology
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