High speed laser printing and sintering of flexible RFID antennas and fingerprint sensors

Ioannis Theodorakos; Filimon Zacharatos; Marina Makrygianni; Agamemnon Kalaitzis; Olga Koritsoglou; Jonathan Ankri; Arye Schwarzbaum; Alon Melamed; Merijn Giesbers; Gari Arutinov; Simon Tuohi; Daniel Arnaldo; Nuno Braz; Riccardo Geremia; Dimitris Karnakis; Semyon Melamed; Ayala Kabla; Fernando De la Vega; Darshana Kariyapperuma; Brian Cobb; Richard Price; Patrick Too; Shane Norval; Ioanna Zergioti

doi:10.1117/12.2561050

11 March 2020 High speed laser printing and sintering of flexible RFID antennas and fingerprint sensors

Ioannis Theodorakos, Filimon Zacharatos, Marina Makrygianni, Agamemnon Kalaitzis, Olga Koritsoglou, Jonathan Ankri, Arye Schwarzbaum, Alon Melamed, Merijn Giesbers, Gari Arutinov, Simon Tuohi, Daniel Arnaldo, Nuno Braz, Riccardo Geremia, Dimitris Karnakis, Semyon Melamed, Ayala Kabla, Fernando De la Vega, Darshana Kariyapperuma, Brian Cobb, Richard Price, Patrick Too, Shane Norval, Ioanna Zergioti

Author Affiliations +

Proceedings Volume 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV; 1126709 (2020) https://doi.org/10.1117/12.2561050
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

The recent developments in the field of large area, flexible and printed electronics have fueled substantial advancements in Laser Printing and Laser Sintering, which have been attracting interest over the past decade. Resulting applications, ranging from flexible displays and sensors, to biometric devices and healthcare, have already showcased transformational advantages in terms of form factor, weight and durability. In HiperLAM project, Laser-Induced Forward Transfer (LIFT), combined with high speed laser micro-sintering are employed, as digital microfabrication tools for the demonstration of fully functional RFID antennas and fingerprint sensors based on highly viscous Ag and Cu nanoparticle inks. Having previously successfully demonstrated complex structures, this work’s focus is on increasing the process throughput and yield by increasing the laser repetition rate (up to 40 kHz) and scanning speed (up to 2 m/s), without compromising reliability and resolution. In order to gain insight into the effects of the incremented repetition rate on the printing procedure, the latter was monitored in real time via a high-speed camera, able to acquire up to 540.000 fps, coupled to the setup. Examples of resulting structures comprise well-defined interdigitated and spiral micro-electrodes with post-sintering electrical resistivity lower than 5 x bulk Ag and 3 x bulk Cu. The aforementioned results validate the compatibility of laser based processing with the field of flexible RFID tags and OTFT based fingerprint sensors and foster the wider adoption of LIFT and laser micro-sintering technology for laboratory and industrial use.

Conference Presentation

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Ioannis Theodorakos, Filimon Zacharatos, Marina Makrygianni, Agamemnon Kalaitzis, Olga Koritsoglou, Jonathan Ankri, Arye Schwarzbaum, Alon Melamed, Merijn Giesbers, Gari Arutinov, Simon Tuohi, Daniel Arnaldo, Nuno Braz, Riccardo Geremia, Dimitris Karnakis, Semyon Melamed, Ayala Kabla, Fernando De la Vega, Darshana Kariyapperuma, Brian Cobb, Richard Price, Patrick Too, Shane Norval, and Ioanna Zergioti "High speed laser printing and sintering of flexible RFID antennas and fingerprint sensors", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126709 (11 March 2020); https://doi.org/10.1117/12.2561050

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