Optofluidics in alumino-borosilicate glass by femtosecond laser micromachining (Conference Presentation)

Andrea Crespi; Francesca Bragheri; Roberto Osellame

doi:10.1117/12.2545117

9 March 2020 Optofluidics in alumino-borosilicate glass by femtosecond laser micromachining (Conference Presentation)

Andrea Crespi, Francesca Bragheri, Roberto Osellame

Proceedings Volume 11268, Laser-based Micro- and Nanoprocessing XIV; 112680M (2020) https://doi.org/10.1117/12.2545117
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

Femtosecond laser irradiation followed by chemical etching (FLICE), combined with femtosecond-laser waveguide writing, has allowed to demonstrate, in the past years, a variety of compact optofluidic devices in fused silica substrate. Applications are diverse and range from biochemical sensing to single-cell manipulation. On the other hand, femtosecond-laser written circuits with high complexity, and waveguides with very low insertion loss, have been reported in Eagle alumino-borosilicate glass (Corning). Here we show that FLICE can be applied to produce buried microchannels also in EagleXG substrate. Our results will enable quick fabrication of microfluidic devices, directly interfaced with complex and low-loss photonic circuits.

Conference Presentation

Citation Download Citation

Andrea Crespi, Francesca Bragheri, and Roberto Osellame "Optofluidics in alumino-borosilicate glass by femtosecond laser micromachining (Conference Presentation)", Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112680M (9 March 2020); https://doi.org/10.1117/12.2545117

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