CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11268 > Article
Presentation
9 March 2020 Investigation of magnetic-field assisted laser ablation of silicon by using short and ultrashort laser pulses (Conference Presentation)
Mareike Schäfer, Falicienne Gnintedem Keabou, Garik Torosyan, Yiyun Kang, Hicham Derouch, Baerbel Rethfeld, Johannes A. L'huillier, Pavel Terekhin
Author Affiliations +
Proceedings Volume 11268, Laser-based Micro- and Nanoprocessing XIV; 112681I (2020) https://doi.org/10.1117/12.2546458
Event: SPIE LASE, 2020, San Francisco, California, United States
Abstract
During the last decades laser micromachining became a valuable tool for many applications in automotive, medicine, tool construction, or mobile technology. Beside the quality, processing time and production costs are crucial questions. A promising approach to achieve high throughput combined with good processing quality represent laser ablation by an assisting magnetic-field. Therefore, we studied the influence of an applied magnetic field to the ablation behaviour of silicon by using short and ultrashort laser pulses. Based on the experimental results we report on a first theoretical model that addresses the energy distribution of the heated electrons in the irradiated area.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Mareike Schäfer, Falicienne Gnintedem Keabou, Garik Torosyan, Yiyun Kang, Hicham Derouch, Baerbel Rethfeld, Johannes A. L'huillier, and Pavel Terekhin "Investigation of magnetic-field assisted laser ablation of silicon by using short and ultrashort laser pulses (Conference Presentation)", Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112681I (9 March 2020); https://doi.org/10.1117/12.2546458
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Laser ablation
Silicon
Ultrafast phenomena
Semiconductor lasers
Magnetism
Electrons
Micromachining
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top