Lixiviation Effects In Glass Polishing

K. Holger Fiedler

doi:10.1117/12.961434

21 December 1989 Lixiviation Effects In Glass Polishing

K. Holger Fiedler

Proceedings Volume 1128, Glasses for Optoelectronics; (1989) https://doi.org/10.1117/12.961434
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

From our glass polishing process of precision optics we know that its physical-chemical nature frequently leads to a complex interaction of several parameters determining the process and the resulting quality. Surface analysis using SIMS and WDX prove that surface and sharp edge polishing of integrated optics chips has to be watched critically in order to obtain useful parts in a reproducible manner.

Citation Download Citation

K. Holger Fiedler "Lixiviation Effects In Glass Polishing", Proc. SPIE 1128, Glasses for Optoelectronics, (21 December 1989); https://doi.org/10.1117/12.961434

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available