An ex-situ surface profile measurement scheme using a zonal wavefront sensor with simultaneous presence of reference and test wavefronts

Nagendra Kumar; Alika Khare; Bosanta R. Boruah

doi:10.1117/12.2542102

2 March 2020 An ex-situ surface profile measurement scheme using a zonal wavefront sensor with simultaneous presence of reference and test wavefronts

Nagendra Kumar, Alika Khare, Bosanta R. Boruah

Author Affiliations +

Proceedings Volume 11287, Photonic Instrumentation Engineering VII; 1128719 (2020) https://doi.org/10.1117/12.2542102
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

If a zonal wavefront sensor such as the Shack-Hartmann wavefront sensor is used to measure the surface profile, the sensing scheme apart from the test wavefront requires a reference wavefront. In order to switch between the two there is a need to replace the test surface by a reference surface such as a mirror. This often introduces inaccuracies in the measurement. In this paper, we introduce an experimental arrangement comprising wave plates and polarizing beam splitters where both the reference and the test wavefronts can be simultaneously present or one can easily switch from reference wavefront to test wavefront.

Citation Download Citation

Nagendra Kumar, Alika Khare, and Bosanta R. Boruah "An ex-situ surface profile measurement scheme using a zonal wavefront sensor with simultaneous presence of reference and test wavefronts", Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 1128719 (2 March 2020); https://doi.org/10.1117/12.2542102

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