Research on surface extension process technology for restraining edge effect in CNC polishing

Jinyong Huang; Qing Hu II; Lei Xie III; Ping Ma IV; Dingyao Yan V

doi:10.1117/12.2549169

31 January 2020 Research on surface extension process technology for restraining edge effect in CNC polishing

Jinyong Huang, Qing Hu II, Lei Xie III, Ping Ma IV, Dingyao Yan V

Proceedings Volume 11427, Second Target Recognition and Artificial Intelligence Summit Forum; 114270C (2020) https://doi.org/10.1117/12.2549169
Event: Second Target Recognition and Artificial Intelligence Summit Forum, 2019, Changchun, China

Abstract

Aiming at the improvement of edge effect in CNC polishing. A new polishing method based on the surface extension is proposed. The basic idea and workflow are presented. The availability of this method is verified by simulation. Experimental study was carried out on 420mm×420mm caliber fused quartz optical element. The experimental results show that this method can restrain the collapse and warped edge surface. PV less than λ/3，GRMS less than 7.7nm/cm and PSD1 less than 1.8nm can be obtained combining the small scale smoothing technology.

Citation Download Citation

Jinyong Huang, Qing Hu II, Lei Xie III, Ping Ma IV, and Dingyao Yan V "Research on surface extension process technology for restraining edge effect in CNC polishing", Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 114270C (31 January 2020); https://doi.org/10.1117/12.2549169

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