A coronagraph for the sensing of fabrication errors in diffraction gratings

Sofia C. Corzo-Garcia; Ulf Griesmann

doi:10.1117/12.2568550

20 August 2020 A coronagraph for the sensing of fabrication errors in diffraction gratings

Proceedings Volume 11487, Optical Manufacturing and Testing XIII; 114871G (2020) https://doi.org/10.1117/12.2568550
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

We describe a coronagraph-like instrument for the characterization of fabrication errors in diffraction gratings and diffractive optics. A diffraction grating under test is illuminated with collimated laser light, and a reflected diffraction order is focused by a lens. A beam stop placed at the focal plane of the lens blocks the primary diffracted beam, passing only the small fraction of light scattered into nearby angles due to fabrication errors. The transmitted light fraction is focused by a second lens onto a digital camera and the light distribution is measured with a sensitive high dynamic range imaging method. Preliminary measurements with the coronagraph setup are compared to focal-plane images made without beam stop.

Conference Presentation

Citation Download Citation

Sofia C. Corzo-Garcia and Ulf Griesmann "A coronagraph for the sensing of fabrication errors in diffraction gratings", Proc. SPIE 11487, Optical Manufacturing and Testing XIII, 114871G (20 August 2020); https://doi.org/10.1117/12.2568550

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