Controlling transitional time of DMD mirror array by physical and electrical methods

Xianyue Deng; Yuzuru Takashima

doi:10.1117/12.2569569

28 August 2020 Controlling transitional time of DMD mirror array by physical and electrical methods

Xianyue Deng, Yuzuru Takashima

Proceedings Volume 11500, ODS 2020: Industrial Optical Devices and Systems; 115000D (2020) https://doi.org/10.1117/12.2569569
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

Digital Micromirror Device (DMD) is a commercial and mass-produced Micro Electromechanical System (MEMS) spatial light modulator (SLM) consisting of millions of mirrors that spatially modulate lights by switching it between on and off states. Between the on- and off-states, transitional states exist where micromirror changes tilt angle. We report a method to control the transitional time of the mirror array by controlling the pressure of the ambient air. The increased air pressure to 100 psi increases mirrors transitional time by 20%. We also address the possibility of controlling the transitional time electrically.

Conference Presentation

Citation Download Citation

Xianyue Deng and Yuzuru Takashima "Controlling transitional time of DMD mirror array by physical and electrical methods", Proc. SPIE 11500, ODS 2020: Industrial Optical Devices and Systems, 115000D (28 August 2020); https://doi.org/10.1117/12.2569569

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