Test system for wafer-level silicon-photonics testing

Peng Zhang; Bo Tang; Yan Yang; Bin Li; Ruonan Liu; Ling Xie; Zhihua Li; Fujiang Lin

doi:10.1117/12.2573456

10 October 2020 Test system for wafer-level silicon-photonics testing

Peng Zhang, Bo Tang, Yan Yang, Bin Li, Ruonan Liu, Ling Xie, Zhihua Li, Fujiang Lin

Proceedings Volume 11548, Optical Design and Testing X; 115481B (2020) https://doi.org/10.1117/12.2573456
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

Silicon photonics has emerged as an attractive technology for developing low-cost and high-speed optical communication and optical interconnects. We design a test station which enables semi-automatic for optical-optical and electro-optical testing of passive and active device. Advances in automated wafer-level optical test enable statistical photonic device characterization for development, photonic modeling, and manufacturing controls. Meanwhile we study the influence of fiber tilt angle and height on the measurement.

Citation Download Citation

Peng Zhang, Bo Tang, Yan Yang, Bin Li, Ruonan Liu, Ling Xie, Zhihua Li, and Fujiang Lin "Test system for wafer-level silicon-photonics testing", Proc. SPIE 11548, Optical Design and Testing X, 115481B (10 October 2020); https://doi.org/10.1117/12.2573456

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