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10 October 2020 Interferometric testing of cylindrical inner surface
Hao Sun, Sen Han, Chunyan Wang, Huan Liu
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Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 115521F (2020) https://doi.org/10.1117/12.2573838
Event: SPIE/COS Photonics Asia, 2020, Online Only
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Abstract
Surface shape of precision ring is critical to its performance. To require the whole surface information, more requirements are needed for traditional measurement. A Fizeau type interferometric system is proposed, with a 90° conical mirror the whole cylindrical inner surface can be achieved through one measurement. Considering the introduced errors from the real experiment condition, it is almost impossible to get the real surface information from the inner surface. Any small angular deviation from the 90° cone and misplacement from its ideal position may result in large measurement errors. These errors are hard to be removed before their origins are figured out, also their influence on the measurement results are understood. The principle of the testing setup, the theoretical analysis of main errors based on a cylindrical coordinate, computer simulations by MatLab, and experimental validation are presented in this paper.
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Hao Sun, Sen Han, Chunyan Wang, and Huan Liu "Interferometric testing of cylindrical inner surface", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 115521F (10 October 2020); https://doi.org/10.1117/12.2573838
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KEYWORDS
Interferometry
Error analysis
Computer simulations
MATLAB
Mirrors
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