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5 November 2020 Study on evolution law of optical surface roughness in Lap-MRF
Feng Guan, Hao Hu, Ruijie Liu, Xin Li, Qilin Yang
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Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 1156811 (2020) https://doi.org/10.1117/12.2579720
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China
Abstract
Lap-MRF, which is considered as a novel flexible finishing method, can produce smooth optical surface. In this paper, the influence mechanism of the optical surface roughness in Lap-MRF is analyzed. The effect of the processing parameters on the optical surface roughness after Lap-MRF is studied by orthogonal experiments. Based on the experimental results, the processing parameters of Lap-MRF are optimized to achieve optical surface with low RMS (Root-Mean-Square) value. At last, a K9 optical surface is finished under the optimal processing parameters and its optical surface roughness is improved to 0.459 n m RMS from 1.669 nm RMS. The results verify that Lap-MRF has great potential in finishing optical surface with high quality.
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Feng Guan, Hao Hu, Ruijie Liu, Xin Li, and Qilin Yang "Study on evolution law of optical surface roughness in Lap-MRF", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 1156811 (5 November 2020); https://doi.org/10.1117/12.2579720
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KEYWORDS
Surface finishing
Surface roughness
Polishing
Magnetorheological finishing
Optics
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