Fabrication Of Supersmooth Spherical Quartz Blank For Soft X-Ray Synchrotron Radiation Grating Monochromator In China

Zhou Changxin; Shu Deming; Liu Wuming

doi:10.1117/12.962640

28 July 1989 Fabrication Of Supersmooth Spherical Quartz Blank For Soft X-Ray Synchrotron Radiation Grating Monochromator In China

Zhou Changxin, Shu Deming, Liu Wuming

Author Affiliations +

Proceedings Volume 1160, X-Ray/EUV Optics for Astronomy and Microscopy; (1989) https://doi.org/10.1117/12.962640
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A spherical grating monochromator (SGM) has been designed and installed in beamline 48913 at Beijing Electron Positron Collider (BEPC) for synchrotron radiation soft x-ray photoemission experiments. There are four laminar gratings in this monochromator to covering the region of 10 -1100ev. On three of them, which covering the soft x-ray range, a supersmooth blank surface with large radial (57M) and high figuring accuracy (>λ/50) is required to suit the monochromator high resolving power desgn (>2000) and reduce the beam power loss. In this paper, the methods of fabrication and metrology has been described, the test results of this plank using WYKO and ZYGO show that the surface roughness of this blank is about 2Å RMS with 0.014 figure tolerance.

Citation Download Citation

Zhou Changxin, Shu Deming, and Liu Wuming "Fabrication Of Supersmooth Spherical Quartz Blank For Soft X-Ray Synchrotron Radiation Grating Monochromator In China", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962640

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