Optimized fabrication and detection of nanomechanical resonators based on graphene membranes

Ye Tian; Chen Yang; Heng Lu; Fengnan Chen; Fanqi Xu; Jun Lu; Youlong Xian; Wei Song; Ying Yan; Joel Moser

doi:10.1117/12.2585423

4 December 2020 Optimized fabrication and detection of nanomechanical resonators based on graphene membranes

Ye Tian, Chen Yang, Heng Lu, Fengnan Chen, Fanqi Xu, Jun Lu, Youlong Xian, Wei Song, Ying Yan, Joel Moser

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 1161732 (2020) https://doi.org/10.1117/12.2585423
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

Nanomechanical resonators based on two-dimensional materials offer opportunities to study the mechanical properties of atomically thin membranes and to develop sensitive detection schemes. However, these applications are limited by problems with nanofabrication. In addition, graphene is a pure surface that is sensitive to contamination. It is challenging to keep graphene clean during fabrication. Here we present our graphene resonator fabrication process. We control the geometry of the cavity over which graphene is suspended to prevent the membrane from collapsing. Then we minimize the occurrence of fabrication residues on the supporting substrate and optimize the cleanliness and flatness of the interface between graphene and electrodes used for electrostatic actuation. After optimizing the fabrication of the graphene resonator, we measure the frequency response of our resonators using an optical interferometry setup. We control the resonant frequency of vibrational modes by applying a dc voltage between the membrane and an electrode patterned at the bottom of the cavity and verify that the response of our resonators is tunable over a wide frequency range.

Citation Download Citation

Ye Tian, Chen Yang, Heng Lu, Fengnan Chen, Fanqi Xu, Jun Lu, Youlong Xian, Wei Song, Ying Yan, and Joel Moser "Optimized fabrication and detection of nanomechanical resonators based on graphene membranes", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 1161732 (4 December 2020); https://doi.org/10.1117/12.2585423

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available