Laser patterning and crystallization of 2D materials on rigid and flexible substrates

Zabihollah Ahmadi; Parvin Fathi-Hafshejani; Masoud Mahjouri-Samani

doi:10.1117/12.2578350

5 March 2021 Laser patterning and crystallization of 2D materials on rigid and flexible substrates

Zabihollah Ahmadi, Parvin Fathi-Hafshejani, Masoud Mahjouri-Samani

Proceedings Volume 11675, Synthesis and Photonics of Nanoscale Materials XVIII; 116750C (2021) https://doi.org/10.1117/12.2578350
Event: SPIE LASE, 2021, Online Only

Abstract

Two-dimensional (2D) materials have been viewed as a promising candidate for future electronic, optoelectronic, and photonic applications. This, however, demands controlled synthesis and precise integration of such materials with complex patterns onto rigid and flexible substrates. Here we introduce a new laser-based approach that enables the integration of 2D materials onto the flexible and rigid substrate with desired shapes and patterns. We report direct laser crystallization and the pattering of MoS₂ and WSe₂ on PDMS and quartz substrates. A thin layer of solid-state stoichiometric amorphous 2D film is deposited onto the substrates, followed by a controlled crystallization and direct writing process using a tunable nanosecond laser (1064 nm). This novel method enables the use of emerging 2D materials in future electronics, optoelectronics, and photonics applications where intricate patterning and/or flexible substrates are required.

Conference Presentation

Citation Download Citation

Zabihollah Ahmadi, Parvin Fathi-Hafshejani, and Masoud Mahjouri-Samani "Laser patterning and crystallization of 2D materials on rigid and flexible substrates", Proc. SPIE 11675, Synthesis and Photonics of Nanoscale Materials XVIII, 116750C (5 March 2021); https://doi.org/10.1117/12.2578350

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