Presentation + Paper
5 March 2021 Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays
Stefan T. Ilie, Thalia Domínguez Bucio, Teerapat Rutirawut, Lorenzo Mastronardi, Ilias Skandalos, Harold Chong, Frederic Y. Gardes
Author Affiliations +
Abstract
Silicon nitride (SiNx), an associated CMOS photonics enabling material, provides a promising and complementary photonic platform for the development of low-cost CMOS compatible waveguides and related photonic components. We propose a 16 element - 2D scanning optical phased array circuit based on a Si-rich core, which reconciliates the requirements of power handling and field-of-view for automotive LiDAR. This dispersive optical phased array consists of wavelength-dependent grating coupler antenna arrays and spiral-delay lines that allow achieving a field-of-view of (35°x 17°) and an angular resolution of (0.15°x1.2°).
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefan T. Ilie, Thalia Domínguez Bucio, Teerapat Rutirawut, Lorenzo Mastronardi, Ilias Skandalos, Harold Chong, and Frederic Y. Gardes "Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays", Proc. SPIE 11690, Smart Photonic and Optoelectronic Integrated Circuits XXIII, 1169005 (5 March 2021); https://doi.org/10.1117/12.2578251
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KEYWORDS
Silicon

Integrated optics

Phased array optics

Phased arrays

Photonics

Optical circuits

Optical components

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