Statistical assessment of silicon photonics components in multi-project wafers

Giuseppe Giannuzzi; Paolo Bardella

doi:10.1117/12.2578931

5 March 2021 Statistical assessment of silicon photonics components in multi-project wafers

Giuseppe Giannuzzi, Paolo Bardella

Proceedings Volume 11691, Silicon Photonics XVI; 1169111 (2021) https://doi.org/10.1117/12.2578931
Event: SPIE OPTO, 2021, Online Only

Conference Poster

Abstract

We report on the statistical assessment of the properties of directional couplers based on silicon waveguides, growth by IMEC fab in Belgium in the framework of the Europractice partnership. We characterized 25 chips from a multi-project wafer, each one containing several passive add-drop ring resonators with different coupling strengths. The analysis was repeated for chip temperatures ranging from 25°C to 55°C. The measurements we performed confirmed the reliability of the iSiPP50G platform used to growth the considered components.

Conference Presentation

Citation Download Citation

Giuseppe Giannuzzi and Paolo Bardella "Statistical assessment of silicon photonics components in multi-project wafers", Proc. SPIE 11691, Silicon Photonics XVI, 1169111 (5 March 2021); https://doi.org/10.1117/12.2578931

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