High-Q near-visible, air-clad, and thin-film SiN microresonator

Ali Eshaghian Dorche; Bochao Wei; Chandra Raman; Ali Adibi

doi:10.1117/12.2590752

5 March 2021 High-Q near-visible, air-clad, and thin-film SiN microresonator

Ali Eshaghian Dorche, Bochao Wei, Chandra Raman, Ali Adibi

Proceedings Volume 11694, Photonic and Phononic Properties of Engineered Nanostructures XI; 1169427 (2021) https://doi.org/10.1117/12.2590752
Event: SPIE OPTO, 2021, Online Only

Conference Poster

Abstract

We demonstrate high quality factor (high-Q) air-clad optical microresonator in a thinfilm LPCVD-SiN, with loaded quality factor of 1.55 M at the near visible wavelength, suitable for interaction with Rb atoms for single atom detection. This record is achieved with no chemical mechanical polishing or high-temperature post-processing, enabling future fully integrated devices with optoelectronic circuitry.

Citation Download Citation

Ali Eshaghian Dorche, Bochao Wei, Chandra Raman, and Ali Adibi "High-Q near-visible, air-clad, and thin-film SiN microresonator", Proc. SPIE 11694, Photonic and Phononic Properties of Engineered Nanostructures XI, 1169427 (5 March 2021); https://doi.org/10.1117/12.2590752

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