Suspended subwavelength gratings for optical processing and optomechanics

Ali A. Darki; Alexios Parthenopoulos; Bjarke R. Jeppesen; Jens V. Nygaard; Aurélien Dantan

doi:10.1117/12.2585455

5 March 2021 Suspended subwavelength gratings for optical processing and optomechanics

Ali A. Darki, Alexios Parthenopoulos, Bjarke R. Jeppesen, Jens V. Nygaard, Aurélien Dantan

Proceedings Volume 11695, High Contrast Metastructures X; 116951N (2021) https://doi.org/10.1117/12.2585455
Event: SPIE OPTO, 2021, Online Only

Abstract

Owing to their high optical and mechanical quality suspended silicon nitride thin films are widely used for photonics and sensing applications. We discuss the fabrication and characterization of highly reflective one- dimensional subwavelength gratings patterned on commercial high-tensile stress Si₃N₄ membranes. Their non- invasive structural characterization using Atomic Force Microscopy provides detailed information on both the grating transverse profile and the deflection of the films after etching, which are compared with optical measurements and mechanical simulations, respectively. We then apply these ultrathin, low-loss optical components to optical spatial differentiation and demonstrate high quality first- and second-order spatial differentiation of the transverse profile of a Gaussian beam.

Conference Presentation

Citation Download Citation

Ali A. Darki, Alexios Parthenopoulos, Bjarke R. Jeppesen, Jens V. Nygaard, and Aurélien Dantan "Suspended subwavelength gratings for optical processing and optomechanics", Proc. SPIE 11695, High Contrast Metastructures X, 116951N (5 March 2021); https://doi.org/10.1117/12.2585455

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