Acousto-fluidic assembly of III-nitride micro-light-emitting diodes with magnetic alignment

Matthew S. Wong; Drew Melchert; Michael Haggmark; Daniel J. Myers; Srinivas Grandrothula; Mattanjah de Vries; Daniel Gianola; Matthew Begley; Tal Magarlith; James S. Speck; Steven P. DenBaars; Shuji Nakamura

doi:10.1117/12.2581801

5 March 2021 Acousto-fluidic assembly of III-nitride micro-light-emitting diodes with magnetic alignment

Matthew S. Wong, Drew Melchert, Michael Haggmark, Daniel J. Myers, Srinivas Grandrothula, Mattanjah de Vries, Daniel Gianola, Matthew Begley, Tal Magarlith, James S. Speck, Steven P. DenBaars, Shuji Nakamura

Author Affiliations +

Proceedings Volume 11706, Light-Emitting Devices, Materials, and Applications XXV; 1170607 (2021) https://doi.org/10.1117/12.2581801
Event: SPIE OPTO, 2021, Online Only

Abstract

A fluidic assembly of III-nitride micro-light-emitting diodes (μLEDs) is demonstrated by applying external forces. This work introduces a solution-based mass transfer approach for inorganic semiconductor devices with the advantages in being material- and dimensional-agnostic. This method offers precise control in device alignment and orientation. The alignment of μLEDs in solution is controlled by acoustic focusing and the induced pressure forces, and the device orientation is modulated using magnetic field. The detailed mechanisms of the use of acoustic focusing and magnetic field are discussed. This fluidic assembly technique allows high throughput rate and roll-to-roll manufacturing, which is critical to the mass transfer of μLEDs for display and functional fabric applications.

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Matthew S. Wong, Drew Melchert, Michael Haggmark, Daniel J. Myers, Srinivas Grandrothula, Mattanjah de Vries, Daniel Gianola, Matthew Begley, Tal Magarlith, James S. Speck, Steven P. DenBaars, and Shuji Nakamura "Acousto-fluidic assembly of III-nitride micro-light-emitting diodes with magnetic alignment", Proc. SPIE 11706, Light-Emitting Devices, Materials, and Applications XXV, 1170607 (5 March 2021); https://doi.org/10.1117/12.2581801

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