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1 August 2021 Subwavelength pixelated CMOS color sensors based on Anti-Hermitian metasurface
Joseph S. Smalley, Xuexin Ren, Jeong Yub Lee, Xiang Zhang, Sui Yang, Yuan Wang, Woong Ko, Won-Jae Joo, Hongkyu Park, Chang Seung Lee, Hyuck Choo
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Proceedings Volume 11796, Active Photonic Platforms XIII; 117962C (2021) https://doi.org/10.1117/12.2595013
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States
Abstract
We demonstrate subwavelength scale color pixels in a CMOS compatible platform based on anti-Hermitian metasurfaces. In stark contrast to conventional pixels, spectral filtering is achieved through structural color rather than transmissive filters leading to simultaneously high color purity and quantum efficiency. The subwavelength anti-Hermitian metasurface sensor is able to sort three colors over a 100 nm bandwidth in the visible regime, independently of the polarization of normally-incident light. Furthermore, the quantum yield approaches that of commercial silicon photodiodes, with a responsivity exceeding 0.25 A/W for each channel. Our demonstration opens a new door to subwavelength pixelated CMOS sensors and promises future high-performance optoelectronic systems.
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Joseph S. Smalley, Xuexin Ren, Jeong Yub Lee, Xiang Zhang, Sui Yang, Yuan Wang, Woong Ko, Won-Jae Joo, Hongkyu Park, Chang Seung Lee, and Hyuck Choo "Subwavelength pixelated CMOS color sensors based on Anti-Hermitian metasurface", Proc. SPIE 11796, Active Photonic Platforms XIII, 117962C (1 August 2021); https://doi.org/10.1117/12.2595013
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KEYWORDS
CMOS sensors
Sensors
Optical filters
Optoelectronics
Quantum efficiency
Photodiodes
Photovoltaics
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