Fabrication of electroactive polymer actuators for adjustable X-ray optics

A. Debnath; M. Errando

doi:10.1117/12.2594778

23 August 2021 Fabrication of electroactive polymer actuators for adjustable X-ray optics

A. Debnath, M. Errando

Proceedings Volume 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X; 1182211 (2021) https://doi.org/10.1117/12.2594778
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

Adjustable X-ray mirror facets have been identified as a technology that could enable >2m² effective area X-ray optics with sub-arcsecond angular resolution. Electroactive polymers can produce high strains at low voltages, being able to correct the deformations that submillimeter-thick mirror shells experience during mounting and assembly of the optical system. In this paper, we describe the fabrication of μm-scale poly-vinylidene fluoride- co-trifluoroethylene (PVDF-TrFE) electroactive polymer films on at Si substrates with individually-addressable electrodes. The fabrication protocol is low-cost, scalable, and can easily be translated to production by industrial partners. With fabrication temperatures below 150° C, PVDF-TrFE actuator arrays can be deposited on mirror substrates inducing minimal thermal and coating stress.

Citation Download Citation

A. Debnath and M. Errando "Fabrication of electroactive polymer actuators for adjustable X-ray optics", Proc. SPIE 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X, 1182211 (23 August 2021); https://doi.org/10.1117/12.2594778

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