Optimization of a microbolometer pixel for operation in the sub-1 THz region

Oytun Demirörs; Bahar Atik; Emrah Dirican; Hakan Altan; Okan Esentürk; Mustafa Yıldırım; Tayfun Akın

doi:10.1117/12.2594067

1 August 2021 Optimization of a microbolometer pixel for operation in the sub-1 THz region

Oytun Demirörs, Bahar Atik, Emrah Dirican, Hakan Altan, Okan Esentürk, Mustafa Yıldırım, Tayfun Akın

Proceedings Volume 11827, Terahertz Emitters, Receivers, and Applications XII; 118270O (2021) https://doi.org/10.1117/12.2594067
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

Imaging in the Terahertz (THz) region has drawn attention in recent years, but the nature of the THz frequency regime causes some drawbacks in imaging such as long wavelength, high cost, and low emission levels at room temperature. Because of the high atmospheric absorption of THz waves, fabrication of a microbolometer pixel that works in the sub-1 THz frequency regime is necessary. Large pixel pitches due to longer wavelengths and the resulting higher thermal mass pose a difficult challenge. Due to those limitations, a unique design of an absorber is essential for THz microbolometers. This study investigates the use of absorbers based on novel materials and alloys with the goal of developing efficient absorbers in small pixel pitches. First, thin layer metal absorbers typically used in commercial IR microbolometers are characterized in terms of absorption performance in the sub-1 THz region. Thin films based on metal alloys such as TiAlV show a markedly lower absorption in this region than in the IR. To improve the performance of these absorbing layers and reduce pixel pitches. Use of effective media based on the mixture of dielectric materials and metals with patterned thin films are investigated to develop unique absorbing thin layers. It is seen that with the use of an effective medium whose complex dielectric constant is tailored appropriately, efficient absorption of sub-1 THz radiation can be achieved.

Conference Presentation

Citation Download Citation

Oytun Demirörs, Bahar Atik, Emrah Dirican, Hakan Altan, Okan Esentürk, Mustafa Yıldırım, and Tayfun Akın "Optimization of a microbolometer pixel for operation in the sub-1 THz region", Proc. SPIE 11827, Terahertz Emitters, Receivers, and Applications XII, 118270O (1 August 2021); https://doi.org/10.1117/12.2594067

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available