Y1Ba2Cu3O7-x Laser-Ablation Plume Dynamics Measurement By Nanosecond Response Ion Probe: Comparison With Optical Measurements.

D. N. Mashburn; D. B. Geohegan

doi:10.1117/12.965159

19 March 1990 Y₁Ba₂Cu₃O₇_-x Laser-Ablation Plume Dynamics Measurement By Nanosecond Response Ion Probe: Comparison With Optical Measurements.

D. N. Mashburn, D. B. Geohegan

Author Affiliations +

Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965159
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

A family of fast time response ion probes has been developed to study the laser-ablation plume dynamics under Y1Ba2Cu3O7-x film-growth conditions. These probes are useful over a wide range of pressures, distances, laser energies, and energy densities. The ion probe measurements are complemented and corroborated by measurements using spatially and temporally resolved optical emission and absorption spectroscopy. The results confirm a long lived ionized component to the plume and a marked slowing of the plasma front at film deposition pressures and distances. Both the ion probe and spectroscopic techniques show promise as sensitive process monitors for film deposition by laser ablation.

Citation Download Citation

D. N. Mashburn and D. B. Geohegan "Y₁Ba₂Cu₃O₇_-x Laser-Ablation Plume Dynamics Measurement By Nanosecond Response Ion Probe: Comparison With Optical Measurements.", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965159

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available