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In the extreme ultraviolet (EUV) regime, the photon energies are above the threshold for photo-ionization in all solid materials. We examine the absorption coefficients for inverse bremsstrahlung and photo-ionization and the contributions of these processes to EUV absorption under different ionization models. The Saha- Boltzmann ionization model is considered with and without continuum lowering, as well as a novel rate equation model including the photo-ionization transitions in population calculations. We show that photo-ionization plays a significant role early in EUV ablation of solids, but inverse bremsstrahlung absorption dominates once temperatures in the ablated plasma exceed more than a few electron volts.
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J. A. Lolley, G. J. Tallents, "The role of photo-ionization in extreme ultraviolet ablation interactions," Proc. SPIE 11886, International Conference on X-Ray Lasers 2020, 118860T (8 July 2021); https://doi.org/10.1117/12.2592289