Faster and more accurate measurement of surface radius

Robert Smythe; Thomas Stalcup; Allen Hinojosa

doi:10.1117/12.2613491

28 October 2021 Faster and more accurate measurement of surface radius

Robert Smythe, Thomas Stalcup, Allen Hinojosa

Author Affiliations +

Proceedings Volume 11889, Optifab 2021; 118891K (2021) https://doi.org/10.1117/12.2613491
Event: SPIE Optifab, 2021, Rochester, New York, United States

Abstract

Spectrally Controlled Interferometry measures surface form and radius in one measurement. Earlier results demonstrated ~30 PPM uncertainty, which rivals the standard DMI radius measurement, from a simple proof-of-concept test without careful compensation for the ambient environment. Results showing improved uncertainty through better calibration including environmental compensation are presented.

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Robert Smythe, Thomas Stalcup, and Allen Hinojosa "Faster and more accurate measurement of surface radius", Proc. SPIE 11889, Optifab 2021, 118891K (28 October 2021); https://doi.org/10.1117/12.2613491

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