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23 August 2021 The study of a phase difference defect inspection technology
Tosyo Cho, Sui Ryu, Syoryu Cho
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Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology; 119080K (2021) https://doi.org/10.1117/12.2595839
Event: Photomask Japan 2021, 2021, Online Only
Abstract
In this paper, we present results of long-term stability tests of a low-loss (<0.55 dB) hollow core fiber (HCF) to standard optical fiber interconnection prepared by modified gluing-based fiber-array technology. We measured insertion loss of three interconnected HCF samples over a period of 100 days at room temperature, observing a variation in insertion loss of less than 0.02 dB. Subsequently, we placed the HCF samples in a climatic chamber and heated to +85◦C in four cycles. Maximum insertion loss variation of 0.10 dB was observed for HCF samples with angled 8◦ interconnections and only 0.02 dB for a HCF sample with a flat interconnection.
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Tosyo Cho, Sui Ryu, and Syoryu Cho "The study of a phase difference defect inspection technology", Proc. SPIE 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology, 119080K (23 August 2021); https://doi.org/10.1117/12.2595839
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KEYWORDS
Defect detection
Glasses
Light scattering
Microscopy
Inspection
Photomasks
Scattering
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