Optical properties of semiconductor microspheres fabricated via laser ablation in superfluid helium

Yosuke Minowa; Tomoki Nagao; Masaaki Ashida

doi:10.1117/12.2616171

27 October 2021 Optical properties of semiconductor microspheres fabricated via laser ablation in superfluid helium

Yosuke Minowa, Tomoki Nagao, Masaaki Ashida

Proceedings Volume 11926, Optical Manipulation and Structured Materials Conference 2021; 1192614 (2021) https://doi.org/10.1117/12.2616171
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

We fabricated semiconductor zinc oxide microspheres via the pulsed laser ablation in the superfluid helium. The fabricated microspheres have a smooth surface and act as an optical microcavity showing whispering gallery mode resonances. We observed the inner structure of the microspheres after milling the part of the microspheres using focused ion beam. The observation of the milled surface reveals that some of the fabricated microspheres include voids. In particular, the larger microspheres tend to have voids inside themselves. Furthermore, we demonstrated that the microspheres with voids can have a high quality factor whispering gallery mode resonance if the void is positioned near the middle of the volume.

Citation Download Citation

Yosuke Minowa, Tomoki Nagao, and Masaaki Ashida "Optical properties of semiconductor microspheres fabricated via laser ablation in superfluid helium", Proc. SPIE 11926, Optical Manipulation and Structured Materials Conference 2021, 1192614 (27 October 2021); https://doi.org/10.1117/12.2616171

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