The FDTD analysis for diffraction limited microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy

Yizhao Guan; Masahiro Kume; Shotaro Kadoya; Masaki Michihata; Satoru Takahashi

doi:10.1117/12.2616266

27 October 2021 The FDTD analysis for diffraction limited microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy

Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi

Author Affiliations +

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 119270J (2021) https://doi.org/10.1117/12.2616266
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

The optical-based super-resolution, non-invasive method is preferred for the inspection of surfaces with massive microstructures widely applied in functional surfaces. The Structured Illumination Microscopy (SIM) uses standing-wave illumination to reach optical super-resolution. Recently, coherent SIM is being studied. It can obtain both the super-resolved intensity distribution and the phase and amplitude distribution from the sample surface. By analysis of the phase-depth dependency, the depth measurement for microgroove structures with coherent SIM is expected. FDTD analysis is applied for observing the near-field response of microgroove narrower than the diffraction limit under the standing-wave illumination. The near-field phase shows depth dependency in this analysis.

Citation Download Citation

Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, and Satoru Takahashi "The FDTD analysis for diffraction limited microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 119270J (27 October 2021); https://doi.org/10.1117/12.2616266

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