Poster + Presentation + Paper
3 March 2022 A PMUT based photoacoustic system as a microfluidic concentration detector
Author Affiliations +
Conference Poster
Abstract
We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (~31) and its wide fractional bandwidth (~73%).
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kaustav Roy, Vijayendra Shastri, Akshay Kumar, Jagi Rout, Isha Isha, Kritank Kalyan, Jaya Prakash, and Rudra Pratap "A PMUT based photoacoustic system as a microfluidic concentration detector", Proc. SPIE 11960, Photons Plus Ultrasound: Imaging and Sensing 2022, 1196013 (3 March 2022); https://doi.org/10.1117/12.2608934
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KEYWORDS
Microfluidics

Photoacoustic spectroscopy

Sensors

Pulsed laser operation

Silicon

Receivers

Ultrasonography

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