Suppressed ablation rate of titanium surface by two-color double pulse femtosecond laser

Keisuke Takenaka; Masaki Hashida; Yuki Furukawa; Yuji Sato; Masahiro Tsukamoto

doi:10.1117/12.2608373

4 March 2022 Suppressed ablation rate of titanium surface by two-color double pulse femtosecond laser

Keisuke Takenaka, Masaki Hashida, Yuki Furukawa, Yuji Sato, Masahiro Tsukamoto

Proceedings Volume 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; 119880F (2022) https://doi.org/10.1117/12.2608373
Event: SPIE LASE, 2022, San Francisco, California, United States

Conference Poster

Abstract

The material processing with a femtosecond double-pulse laser beam has been demonstrated since 1990s. Only a few papers have discussed the possibility of ablation suppression mechanism. The mechanism of laser ablation with the double pulse beam is still open question due to two pulses consist of same laser wavelength because it is difficult to distinguish between the effects of the first and second pulses. In this study, the ablation rate has been investigated for titanium with a two-color double-pulse laser beam in the delay time (Δt) from 0 to 600 ps. The double pulse laser beam consisted of 800 nm with 150 fs pulse and 400 nm with < 150 fs pulse in cross polarization. The fluence of the first pulse was kept above the ablation threshold, while the fluence of the second pulse was kept below the ablation threshold. The ablation rate was clearly suppressed at the delay time of Δt ~ 60 ps in case of second pulse of 400 nm. On the other hand, in case of second pulse of 800 nm, the ablation rate was suppressed at the delay time of Δt ~ 200 ps. The delay time was approximately three times difference for both irradiation case. The difference of the delay time might be suggested that the ablation rate was effectively suppressed when the expanding surface plasma produced by first laser pulse should be close to the critical density for the second laser pulse.

Conference Presentation

Citation Download Citation

Keisuke Takenaka, Masaki Hashida, Yuki Furukawa, Yuji Sato, and Masahiro Tsukamoto "Suppressed ablation rate of titanium surface by two-color double pulse femtosecond laser", Proc. SPIE 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, 119880F (4 March 2022); https://doi.org/10.1117/12.2608373

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