Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling

Zuyang Liu; Grigorij Muliuk; Jing Zhang; Günther Roelkens; Nicolas Le Thomas; Roel Baets

doi:10.1117/12.2626309

5 March 2022 Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling

Zuyang Liu, Grigorij Muliuk, Jing Zhang, Günther Roelkens, Nicolas Le Thomas, Roel Baets

Proceedings Volume 12004, Integrated Optics: Devices, Materials, and Technologies XXVI; 1200404 (2022) https://doi.org/10.1117/12.2626309
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We demonstrate a new post-processing approach to efficiently couple light in silicon nitride (Si3N4) photonic integrated circuits (PIC) via grating couplers. Thin-film coupons of apodised Si₃N₄ grating couplers functionalized with metallic bottom reflectors and adiabatic couplers are micro-transfer printed onto the input and output of Si₃N₄ waveguides, providing efficient coupling without jeopardizing the rest of the PIC. Two-dimensional FDTD simulations predict coupling efficiencies as large as 70% (-1.5dB) at a wavelength of 785nm. As a proof-of-concept, we report an experimental coupling efficiency of -4.6dB, which is 2.6dB better than the values obtained with standard designs of grating couplers.

Conference Presentation

Citation Download Citation

Zuyang Liu, Grigorij Muliuk, Jing Zhang, Günther Roelkens, Nicolas Le Thomas, and Roel Baets "Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling", Proc. SPIE 12004, Integrated Optics: Devices, Materials, and Technologies XXVI, 1200404 (5 March 2022); https://doi.org/10.1117/12.2626309

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available