Micromachined water-immersible scanning mirror with torsional and bending hinges

Suangliang Li; Xiaoyu Duan; Jun Zou

doi:10.1117/12.2608892

1 March 2022 Micromachined water-immersible scanning mirror with torsional and bending hinges

Suangliang Li, Xiaoyu Duan, Jun Zou

Proceedings Volume 12013, MOEMS and Miniaturized Systems XXI; 120130C (2022) https://doi.org/10.1117/12.2608892
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

This paper reports a new two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending BoPET (biaxially-oriented polyethylene terephthalate) hinges. A micromachining-based fabrication process is developed to enable high patterning resolution and alignment accuracy and to reduce the amount of manual assembly. With a torsional hinge, the fast axis has a resonance frequency of ~300 Hz in air and ~200 Hz in water. With a bending hinge, the slow axis has a resonance frequency of 60~70 Hz in air and 20~40 Hz in water. 2D B-scan and 3D volumetric ultrasound microscopy are demonstrated by using the hybrid-hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view.

Conference Presentation

Citation Download Citation

Suangliang Li, Xiaoyu Duan, and Jun Zou "Micromachined water-immersible scanning mirror with torsional and bending hinges", Proc. SPIE 12013, MOEMS and Miniaturized Systems XXI, 120130C (1 March 2022); https://doi.org/10.1117/12.2608892

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