Piezoelectric strain sensor through reverse replication based on two-photon polymerization

Rishikesh Srinivasaraghavan Govindarajan; Taylor Stark; Stanislav Sikulskyi; Foram Madiyar; Daewon Kim

doi:10.1117/12.2630955

18 April 2022 Piezoelectric strain sensor through reverse replication based on two-photon polymerization

Rishikesh Srinivasaraghavan Govindarajan, Taylor Stark, Stanislav Sikulskyi, Foram Madiyar, Daewon Kim

Proceedings Volume 12046, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2022; 1204611 (2022) https://doi.org/10.1117/12.2630955
Event: SPIE Smart Structures + Nondestructive Evaluation, 2022, Long Beach, California, United States

Abstract

Polymer-based composite incorporated with inorganic filler has shown great potential for developing high-performance piezoelectric sensors as they offer unique properties and design flexibility. The aim of this paper is to investigate the impact of nanoparticles on the piezoelectric property enhancement of the developed composite. The piezoelectric substrate made of PVDF-TrFE/ BaTiO₃ is replicated reversely through a master mold made of IP-Q resin with IDT design printed using a two-photon polymerization (2PP) method. IDT channels are filled with a conductive material, and excess material on the surface is etched using oxygen plasma. The crystalline phase characteristics and surface morphology of fabricated substrate are examined using Fourier transform infrared spectroscopy (FT-IR) and scanning electron microscope (SEM). Strain detection of the developed sensor is evaluated by determining the change in scattering parameter using a network analyzer.

Conference Presentation

Citation Download Citation

Rishikesh Srinivasaraghavan Govindarajan, Taylor Stark, Stanislav Sikulskyi, Foram Madiyar, and Daewon Kim "Piezoelectric strain sensor through reverse replication based on two-photon polymerization", Proc. SPIE 12046, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2022, 1204611 (18 April 2022); https://doi.org/10.1117/12.2630955

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