A machine learning approach to inverse lithography

Nataraj Akkiraju; Ilhami Torunoglu

doi:10.1117/12.2613163

13 June 2022 A machine learning approach to inverse lithography

Nataraj Akkiraju, Ilhami Torunoglu

Proceedings Volume 12052, DTCO and Computational Patterning; 120520W (2022) https://doi.org/10.1117/12.2613163
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

Inverse Lithography techniques for mask optimization employ pixel based optimization algorithms and offer superior quality, but are compute intensive. A Machine learning model can be leveraged to replace the compute intensive portion of the ILT flow. In this paper we demonstrate that Machine learning models can be utilized to speed up the turnaround time of ILT flows. A CNN can be trained to compute an initial approximation of the mask, which can then be cleaned up using a few iterations of conventional OPC. We show that a performance gain of about 4X is achievable without any adverse impact on quality.

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Citation Download Citation

Nataraj Akkiraju and Ilhami Torunoglu "A machine learning approach to inverse lithography", Proc. SPIE 12052, DTCO and Computational Patterning, 120520W (13 June 2022); https://doi.org/10.1117/12.2613163

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