Imaging of buried overlay and alignment markers using picosecond acoustic microscopy

Manjusha Mehendale; Andy Antonelli; Robin Mair; Priya Mukundhan; Janusz Bogdanowicz; Victor Blanco; Anne-Laure Charley; Philippe Leray

doi:10.1117/12.2614295

26 May 2022 Imaging of buried overlay and alignment markers using picosecond acoustic microscopy

Manjusha Mehendale, Andy Antonelli, Robin Mair, Priya Mukundhan, Janusz Bogdanowicz, Victor Blanco, Anne-Laure Charley, Philippe Leray

Author Affiliations +

Proceedings Volume 12053, Metrology, Inspection, and Process Control XXXVI; 1205313 (2022) https://doi.org/10.1117/12.2614295
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

Optically opaque materials present a series of challenges for alignment and overlay in the lithography process flow. We demonstrate the efficacy of picosecond acoustic microscopy (PAM) in generating 2D lateral images of structures embedded under opaque layers, including the potential of PAM to generate 3D images by analyzing scanned z planes.

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Citation Download Citation

Manjusha Mehendale, Andy Antonelli, Robin Mair, Priya Mukundhan, Janusz Bogdanowicz, Victor Blanco, Anne-Laure Charley, and Philippe Leray "Imaging of buried overlay and alignment markers using picosecond acoustic microscopy", Proc. SPIE 12053, Metrology, Inspection, and Process Control XXXVI, 1205313 (26 May 2022); https://doi.org/10.1117/12.2614295

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