Random nanostructures based on moth-eye antireflection for broadband and wide-angle transmission-enhanced

Jinshuang Wu; Mingzhao Ouyang; Ziye Ma; Yuegang Fu

doi:10.1117/12.2606522

1 November 2021 Random nanostructures based on moth-eye antireflection for broadband and wide-angle transmission-enhanced

Jinshuang Wu, Mingzhao Ouyang, Ziye Ma, Yuegang Fu

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Proceedings Volume 12057, Twelfth International Conference on Information Optics and Photonics; 120573F (2021) https://doi.org/10.1117/12.2606522
Event: Twelfth International Conference on Information Optics and Photonics, 2021, Xi'an, China

Abstract

In this paper, a quartz surface with random nanostructures is prepared for broadband, large-angle transmissionenhancement. First, the optimal structural parameters are calculated according to the equivalent medium theory and the finite difference time domain method. And then, based on the optimized structural parameters, the quartz surface is prepared via annealing and inductively coupled plasma processes. The measured maximum transmittance of the quartz surface with random nanostructures is 99.3% in the 400-2000nm band, and the average transmittance reaches about 96% in the range of 0-45° incident angle. The experimental results are good consistent with the simulated results. Overall, This study is of great significance to the development of optical windows, display elements and solar cells.

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Jinshuang Wu, Mingzhao Ouyang, Ziye Ma, and Yuegang Fu "Random nanostructures based on moth-eye antireflection for broadband and wide-angle transmission-enhanced", Proc. SPIE 12057, Twelfth International Conference on Information Optics and Photonics, 120573F (1 November 2021); https://doi.org/10.1117/12.2606522

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KEYWORDS

Nanostructures

Transmittance

Quartz

Etching

Finite-difference time-domain method

Annealing

Reflection

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