Design and analysis of a high-resolution micro-optical accelerometer with an electromagnetic driver

Shan Gao; Zhen Zhou; Changkun Feng; Zhuang Huang; Lishuang Feng

doi:10.1117/12.2601347

24 November 2021 Design and analysis of a high-resolution micro-optical accelerometer with an electromagnetic driver

Shan Gao, Zhen Zhou, Changkun Feng, Zhuang Huang, Lishuang Feng

Proceedings Volume 12062, AOPC 2021: Optoelectronics and Nanophotonics; 1206206 (2021) https://doi.org/10.1117/12.2601347
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

Optical displacement detection is widely used in various MEMS sensors because of its high sensitivity. The optical accelerometer has a high theoretical resolution. To increase the measurement range, we proposed a high-resolution micro-optical accelerometer with electromagnetic force feedback. The optical principle, mechanical structure, and manufacturing process are analyzed. The accelerometer is predicted to work in the first modal with displacement sensitivity at 605 nm/g, corresponding to 0th diffraction beam optical sensitivity 1.1 %/nm. The designed electromagnetic driver can increase the acceleration measurement range from 0.066 g to ±20 g. These results provide a theoretical basis for the design and fabrication of a high-resolution micro-optical accelerometer with an electromagnetic driver.

Citation Download Citation

Shan Gao, Zhen Zhou, Changkun Feng, Zhuang Huang, and Lishuang Feng "Design and analysis of a high-resolution micro-optical accelerometer with an electromagnetic driver", Proc. SPIE 12062, AOPC 2021: Optoelectronics and Nanophotonics, 1206206 (24 November 2021); https://doi.org/10.1117/12.2601347

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