CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 12073 > Article
Paper
13 December 2021 Research on removal function and ion beam figuring process for ultra-precision manufacturing optical components
Xiaojing Li, Dasen Wang, Fengming Nie, Pengfei Wu, Shiyan Zhao
Author Affiliations +
Proceedings Volume 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies; 120730L (2021) https://doi.org/10.1117/12.2605262
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China
Abstract
Surface of fused silica optical components were polished by Ion Beam Figuring (IBF) ultra-precision process. Based on the analysis of the relationship between the ion beam current density distribution parameters obtained by faraday scan and the removal function, the removal function model for IBF was established. The IBF experiment for fused silica optical materials were carried out. The experimental results show that the IBF method based on faraday scan can achieve the same figure correcting ability as the traditional IBF method based on line scan experiment. But the offline calculation time of the removal function can be reduced from 2 hours to 5minutes, which improves the efficiency of IBF greatly. After several cycles the initial surface figure error of the optical element before processing, with a PV value from more than 500 nm to less than 15nm and an RMS value from more than 120nm to less than 1.5 nm. Ultra-precision surface of fused silica optical components with nanometer scale were obtained by IBF.
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Xiaojing Li, Dasen Wang, Fengming Nie, Pengfei Wu, and Shiyan Zhao "Research on removal function and ion beam figuring process for ultra-precision manufacturing optical components", Proc. SPIE 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies, 120730L (13 December 2021); https://doi.org/10.1117/12.2605262
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 9 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Ion beams
Ion beam finishing
Optical components
Optics manufacturing
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top