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We have developed 2048x32 arrays of silicon Geiger-mode avalanche photodiodes (GmAPDs) for a terrain mapping lidar to be used in planetary exploration missions. These devices support single photon detection with sub-ns timing. A key performance-limiting issue with arrays is optical crosstalk, in which hot-carrier light emission produced by an avalanche triggers spurious detection events in nearby pixels. To address this challenge, we have demonstrated a deep trench isolation process. This paper will report measurements of crosstalk between pixels in silicon GmAPD arrays, measurements both before and after the arrays are hybridized to a readout integrated circuit. Initial wafer probe measurements before hybridization show order-of-magnitude crosstalk reduction in a pair of test GmAPDs separated by 25 µm. These measurements use a novel technique based on analysis of the statistics of the time difference between the first detection events during a bias pulse. The results of our measurements are consistent with simulations of optical crosstalk modeled using optical ray tracing software.
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Brian F. Aull, Michael Collins, Kevan Donlan, Joseph Ciampi, Meera Punjiya, K. Alexander McIntosh, Kevin Ryu, Deborah Woods, "Mitigation of optical crosstalk in Geiger-mode avalanche photodiode arrays for lidar," Proc. SPIE 12089, Advanced Photon Counting Techniques XVI, 120890E (30 May 2022); https://doi.org/10.1117/12.2618169