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To enhance the precision manufacturing of microstructures, a three-dimensional (3D) isotropic microprobe was developed. This microprobe is a kind of elastic probe based on three-flexible-hinge suspension and orthogonal microball collimation. Utilizing the rotation and translation of the three-flexible-hinge suspension, the 3D tip displacements were transformed into the 3D displacements of the microball of the transfer stylus which was fixed in the reverse coaxial direction to the measuring stylus, then the 3D displacements of the microball were transformed into centroid position shifts of the light spots by the orthogonal microball collimation optical paths. The analysis and experimental results indicated that the X, Y, and Z stiffnesses at the tip of the microprobe were approximately 23 N/m each, the X, Y, and Z sensitivities of the microprobe were respectively 157 pixel/μm, 158 pixel/μm, and 165 pixel/μm, and the X, Y, and Z resolutions of the microprobe were 5 nm each. This microprobe could help realize low measurement force, 3D isotropic measurement of microstructures, and improvement of the measurement accuracy
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