A new method for step height characterization based on K-means algorithm

Xianyu Meng; Chen Wang; Yingjie Yu; Grzegorz M. Krolczyk

doi:10.1117/12.2619314

15 February 2022 A new method for step height characterization based on K-means algorithm

Xianyu Meng, Chen Wang, Yingjie Yu, Grzegorz M. Krolczyk

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121667Y (2022) https://doi.org/10.1117/12.2619314
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

This paper proposes a high-precision characterization method for step height of micro-structured surfaces based on the Kmeans algorithm. First, the original measured surface data obtained by the three-dimensional surface measuring instrument is dimensionally reconstructed. Secondly, use the K-means-based clustering algorithm and data mapping to identify and remove outliers, and the centroid distance of the reconstructed data in the three-dimensional space is mapped to the required step height value. Finally, through the iterative convergence design, the accuracy and robustness of the algorithm characterization results are further improved. Experiment on simulated data shows that this method is robust against outliers. It can effectively and accurately characterize step heights for measurement data of big size. Also, the method can simultaneously ignore outliers during parameterization.

Citation Download Citation

Xianyu Meng, Chen Wang, Yingjie Yu, and Grzegorz M. Krolczyk "A new method for step height characterization based on K-means algorithm", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121667Y (15 February 2022); https://doi.org/10.1117/12.2619314

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KEYWORDS

Computer simulations

Reconstruction algorithms

Data centers

Denoising

Data processing

Associative arrays

Reliability

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