A new generation of SHWFS with dramatically improved spatial resolution dedicated to high performance optical metrology

Jerôme Ballesta; Xavier Levecq; Samuel Bucourt

doi:10.1117/12.2630579

29 August 2022 A new generation of SHWFS with dramatically improved spatial resolution dedicated to high performance optical metrology

Jerôme Ballesta, Xavier Levecq, Samuel Bucourt

Author Affiliations +

Proceedings Volume 12188, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V; 121881G (2022) https://doi.org/10.1117/12.2630579
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Abstract

The Shack Hartmann wavefront sensor (SHWFS) is a reference in the field of optical metrology and laser diagnostic. Over the past 2 decades this wavefront sensing (WFS) technique has been used for the alignment of numerous instruments and the metrology of components. Imagine Optic SA has developed an approach to improve the LIFT technique developed at the ONERA that allows to increase the native spatial resolution of the SHWFS to achieve a factor 16 on the spatial resolution of the SHWFS without degrading dynamic, accuracy and linearity of the instrument. Furthermore this enhanced SHWFS can be associated with accessories such as self illuminated platform (R-Flex) to increase the versatility of these achromatic WFS.

Conference Presentation

Citation Download Citation

Jerôme Ballesta, Xavier Levecq, and Samuel Bucourt "A new generation of SHWFS with dramatically improved spatial resolution dedicated to high performance optical metrology", Proc. SPIE 12188, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V, 121881G (29 August 2022); https://doi.org/10.1117/12.2630579

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