Carbon nanotube microfabricated window with extreme ultraviolet transmission and differential pumping

Scott Olsen; Richard Vanfleet; David Allred; Robert Davis

doi:10.1117/12.2631989

3 October 2022 Carbon nanotube microfabricated window with extreme ultraviolet transmission and differential pumping

Scott Olsen, Richard Vanfleet, David Allred, Robert Davis

Proceedings Volume 12201, UV and Higher Energy Photonics: From Materials to Applications 2022; 1220102 (2022) https://doi.org/10.1117/12.2631989
Event: SPIE Nanoscience + Engineering, 2022, San Diego, California, United States

Abstract

Hollow cathode plasmas are common extreme ultraviolet (EUV) lamps used for material characterization. However, the relatively high pressure of the plasma can affect downstream instruments, as well as absorb the EUV. EUV windows are difficult to fabricate due to EUV’s strong interaction with all materials. We present a carbon nanotube (CNT) microfabricated window composed of multiple high aspect-ratio columns in parallel. The open areas allow wide bandpass transmission, while the walls restrict gas flow. We model the CNT window transmission as a weight function on the light from of a Mcpherson 629-like hollow cathode helium plasma in visible wavelengths. We model the CNT window differential pumping as a series of columns between two chambers of different pressures.

Conference Presentation

Citation Download Citation

Scott Olsen, Richard Vanfleet, David Allred, and Robert Davis "Carbon nanotube microfabricated window with extreme ultraviolet transmission and differential pumping", Proc. SPIE 12201, UV and Higher Energy Photonics: From Materials to Applications 2022, 1220102 (3 October 2022); https://doi.org/10.1117/12.2631989

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available