Free carrier absorption-assisted photodetection using a waveguide-integrated bolometer with flat spectral response for integrated optical sensors

Joonsup Shim; Jinha Lim; Dae-Myeong Geum; Jong-Bum You; Hyeonho Yoon; Joon Pyo Kim; Woo Jin Baek; Jae-Hoon Han; SangHyeon Kim

doi:10.1117/12.2632304

30 September 2022 Free carrier absorption-assisted photodetection using a waveguide-integrated bolometer with flat spectral response for integrated optical sensors

Joonsup Shim, Jinha Lim, Dae-Myeong Geum, Jong-Bum You, Hyeonho Yoon, Joon Pyo Kim, Woo Jin Baek, Jae-Hoon Han, SangHyeon Kim

Author Affiliations +

Proceedings Volume 12234, Infrared Sensors, Devices, and Applications XII; 122340A (2022) https://doi.org/10.1117/12.2632304
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

We experimentally demonstrate the free-carrier absorption (FCA)-assisted photodetection using a waveguide-integrated bolometer on the silicon-on-insulator (SOI) platform at the near-infrared range (1520-1620 nm). A heavily-doped silicon (n + Si) plays a role as an efficient light absorption medium, which exploits the mechanism of FCA in Si. For the thermal-to-electrical conversion, a bolometric material of TiOx/Ti/TiOx tri-layer film is integrated onto the n + Si. It offers a sensitivity of -26.75 %/mW with a highly flat spectral response. In addition, a clear on/off bolometric response with the 1 kHz-modulated optical signal was obtained with the rise and fall times of 24.2 μs and 29.2 μs, respectively, which is enough for diverse sensing applications.

Conference Presentation

Citation Download Citation

Joonsup Shim, Jinha Lim, Dae-Myeong Geum, Jong-Bum You, Hyeonho Yoon, Joon Pyo Kim, Woo Jin Baek, Jae-Hoon Han, and SangHyeon Kim "Free carrier absorption-assisted photodetection using a waveguide-integrated bolometer with flat spectral response for integrated optical sensors", Proc. SPIE 12234, Infrared Sensors, Devices, and Applications XII, 122340A (30 September 2022); https://doi.org/10.1117/12.2632304

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