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We present fabrication and characterization of ultra-thin with ∼15-25 µm thick (300 µm in diameter) diamond single-crystal membranes for various applications in synchrotron radiation sources, x-ray free-electron lasers (XFELs), and XFEL oscillators. Ultra-thin diamond single-crystal membranes are fabricated using laser ablation techniques with ultra-short (femtosecond) laser pulses. Here, we report optimizing the laser ablation parameters such as fluence, power, repetition rate, pulse length, and wavelengths. The crystal quality of the ultra-thin diamond membranes has been characterized by x-ray rocking curve imaging (RCI) of the crystal before and after laser ablation and subsequent high-temperature annealing.
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