Paper
30 August 2022 Effect of viscous film on electrochemical polishing of copper microstructures
Author Affiliations +
Proceedings Volume 12309, International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2022); 123091E (2022) https://doi.org/10.1117/12.2645714
Event: International Conference on Advanced Manufacturing Technology and Manufacturing System (ICAMTMS 2022), 2022, Shijiazhuang, China
Abstract
The surface quality of copper (Cu) microstructures restricts the improvement of their performance. In order to improve the surface quality of Cu microstructures, a subsequent polishing process is required for the microstructures. Electrochemical polishing (ECP) has great potential in high-quality surface polishing of metal structural parts. The viscous film is the key to the realization of the Cu ECP process. In this paper, a multiphysics coupled model is used to analyze the effect of the viscous film and its fluidity on the current density and material removal rate (MRR) at different positions of the microstructure. The simulation and experimental results show that the generation and flow of the viscous film during the ECP process leads to differences in the current density at different positions of the microstructure, thus causing differences in the MRR at different positions of the microstructure. The material removal of the microgroove with thicker viscous film was uneven and smaller. The ability of ECP to process the microgroove was improved by reducing the accumulation of viscous film in the microgroove. This study is not only instructive for the ECP process of microstructures, but also contributes to the further understanding of the ECP mechanism.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chao Zhang, Ping Zhou, Ying Yan, and Dongming Guo "Effect of viscous film on electrochemical polishing of copper microstructures", Proc. SPIE 12309, International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2022), 123091E (30 August 2022); https://doi.org/10.1117/12.2645714
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KEYWORDS
Copper

Polishing

Surface finishing

Ions

Corrosion

Diffusion

Metals

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